mems sensor research paper
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mems sensor research paper




Level Measurement Using MEMS Pressure Sensor
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ABSTRACT In this work, a pressure sensing method is proposed to measurement the liquid level in a tank. Because liquid level sensing in industries like Petro-chemical industries, Paper making industries, Water treatment industries is dangerous when we are using 

A Micro-Watt Second Order Filter for a Chopper Stabilized MEMS Pressure Sensor Interface
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ABSTRACT This paper describes a low-power second-order filter for a continuous-time chopper stabilized capacitive sensor interface, integrated with a fully differential post-CMOS surface-micromachined MEMS pressure sensor. The circuit uses a single-ended folded- 

Optical Interrogation of a Pressure Sensor Fabricated Using MEMS Technology.
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ABSTRACT An optical MEMS (micro-electromechanical system) pressure sensor fabricated using bulk silicon micromachining techniques and tested using single wavelength interrogation technique is presented here. The sensor described here was designed for 

STUDY OF A COPPER CAPACITIVE MEMS AS A SENSOR FOR AUTOMOTIVE FUEL EVALUATION
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ABSTRACT In this work we report the study of a copper capacitive MEMS (Micro-Electro- Mechanical Systems) as a sensor to analyze the quality of automotive fuel such as hydrated ethanol and gasoline used in Brazil. Fuel adulteration is a frequent problem in some 

Design and mathematical model of a ZnO-based MEMS acoustic sensor
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ABSTRACT The paper presents the design and mathematical model of a ZnO-based MEMS acoustic sensor. The structure consists with a 3.0 µm thick piezoelectric ZnO layer sandwiched between a pair of aluminum electrodes on a 30 µm thick silicon diaphragm. 

Semiconductor-Type MEMS Gas Sensor for Real-Time Environmental Monitoring Applications
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Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth 

Digital Vibration Sensor Constructed with MEMS Technology
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In this paper, a new digital sensor of acceleration is described. The sensor is based on MEMS device and is capable of measuring both static (gravity) and dynamic (vibration) accelerations. Its primary application is the measurement of vibrations in buildings and 

Wi-Fi based Multinode MS Level sensor in UAV's using MEMS
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ABSTRACT Communication networks and strategies for cooperative UAV swarms have received significant attention. The main problem in controlling autonomous vehicles needs some knowledge of its altitude angles. These angles can be measured in different ways, 

Design of Piezoresistive MEMS Absolute Pressure Sensor
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ABSTRACT MEMS pressure sensors are one of the most widely commercialized microsensors in the MEMS industry. They have a plethora of applications in various fields including the automobile, space, biomedical, aviation and military sectors. One of the 

CMOS-MEMS Chemiresistive and Chemicapacitive Chemical Sensor System
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ABSTRACT Integrating chemical sensors with testing electronics is a powerful technique with the potential to lower power and cost and allow for lower system limits of detection. This thesis explores the possibility of creating an integrated sensor system intended to be 

Design Analysis of MEMS Capacitive Differential Pressure Sensor for Aircraft Altimeter
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ABSTRACT In this paper, an analytical and simulation solution for Microelectromechanical systems (MEMS) based capacitive differential pressure sensor for aircraft altimeter is proposed. The principle and design of the proposed MEMS capacitive differential 

MEMS Inertial Sensor to Measure the Gravity Gradient Torque in Orbit
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ABSTRACT Since the dawn of the Space Age, over six thousand satellites have been launched into Earth orbit. The function of determining the orientation of a satellite in orbit, so that it can point its antennas and instruments in the required direction is known as attitude 

Design of a Shock Immune MEMS Acceleration Sensor and Optimization by Genetic Algorithm
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ABSTRACT This paper presents a novel capacitive micromachined MEMS acceleration sensor with normal-to-plane shock immunity. The paper takes advantage of suspended cantilevers over the springs of the structure which shorten the spring length for normal 

Design of Novel High Sensitive MEMS Capacitive Fingerprint Sensor
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ABSTRACT In this paper a new design of MEMS capacitive fingerprint sensors is presented. The capacitive sensor is made of two parallel plates with air gap. In these sensors, the capacitance changes is very important factor. It is caused by deformation of the upper 

Mems Pressure Sensor in Automotive Industry
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ABSTRACT Micro-electromechanical systems (MEMS) are free scale's enabling technology for acceleration and pressure sensors. MEMS based sensor products provide an interface that can sense, process and/or control the surrounding environment. Free scale's MEMS- 

A COMPARITIVE ANALYSIS ON NANOWIRE BASED MEMS PRESSURE SENSOR
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ABSTRACT This paper compares a MEMS Piezoresistive pressure sensor which utilizes a circular and square shaped polysilicon diaphragm with a nanowire to enhance the sensitivity of the pressure sensor. The nanowires for both the sensors form the bridge 

MEMS SENSOR BASED UNDERWATER AHRS (ATTITUDE AND HEADING REFERENCE SYSTEM) AIDED BY COMPASS AND PRESSURE SENSOR
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Attitude and Heading angles are crucial parameters for navigation. Conventional navigation methods mostly uses IMU and GPS devices to calculate these angles. MEMS technology offers small sized, low cost IMU sensors with moderate performance. However, GPS 

MEMS Pressure Sensor Testing at Liquid Helium Temperatures Using a Pressure Bomb
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Kelvin to measure their pressure sensitivity, to evaluate their suitability for the detection of quantum turbulence. A pressure bomb would be utilized to ensure sensitivity solely to pressure, rather than pressure and temperature. An apparatus originally developed in a 

MEMS sensor for in situ TEM atomic force microscopy
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ABSTRACT Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope (TEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of 

Mems sensor application for the motion analysis in sports science
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ABSTRACT The author has been applied MEMS accelerometers or the piezoelectric vibrating gyroscopes for the motion analysis in sports activities by attaching them onto the athletes' body segment. As for the upper extremity dominant sports, such as swimming, the inertia 

Surface stress and capacitive MEMS sensor arrays for chemical and biological sensing
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The need for high-throughput label-free multiplexed sensors for chemical and biological sensing has increased tremendously in the last decade with new applications in the areas of genetics, diagnostics, drug discovery, as well as security and threat evaluation. Advances 

Nonlinear dynamics analysis of a parametrically resonant MEMS sensor
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1.ABSTRACT Novel mass sensors based on parametric resonance can achieve high sensitivity because of the sharp transition from zero to large response. Unlike harmonic resonance based mass sensors, the sensitivity of this novel class of sensors will not be 

Development of wireless vibration sensor using MEMS for tunnel construction and maintenance
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ABSTRACT Many tunnels have been constructed in Korea, where 70% of the nation is composed of mountain area, for the development of infrastructures such as the highways, subways, railways, electricity lines, and many other utilities due to the increase of traffic 

FEM simulation of a micro-cantilever optical-MEMS sensor
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ABSTRACT In this work a micro-cantilever optical-MEMS sensor based on AlGaAs system is designed and modeled. The device consists of two micro-cantilever beams perfectly aligned with the free ends separated by approximately 200 nm up to 2000 nm. The beams 

A MEMS Vertical Fringe Comb Capacitive Pressure Sensor for Biomedical Application
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ABSTRACT This paper presents the design and implementation of a Micro Electromechanical Systems (MEMS) vertical fringe comb capacitive pressure sensor for biomedical application. MEMS sensors are widely used in biomedical application due to 

MEMS-based sensor arrays for military applications
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ABSTRACT Scientists and engineers at the Army Aviation and Missile Command's (AMCOM) Research, Development and Engineering Center (RDEC) are cooperatively working with the Defense Advanced Research Projects Agency (DARPA), other Army 

Simulation based design of O2 MEMS sensor
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ABSTRACT The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and the 

Integration of MEMS inertial sensor-based GNC of a UAV
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ABSTRACT Applying Micro Electromechanical Systems (MEMS) inertial sensors for the Guidance, Navigation and Control (GNC) of an autonomous Unmanned Aerial Vehicle (UAV) is an extremely challenging area. This paper presents a practical approach of 

Advancement of a MEMS photoacoustic chemical sensor
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ABSTRACT Photoacoustic spectroscopy is a useful monitoring technique that is well suited for trace gas detection. The technique also possesses favorable detection characteristics when the system dimensions are scaled to a micro-system design. The objective of 

Improving the MEMS pressure sensor
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Simplification of the photolithographic masking steps and/or process geometries can enhance throughput, product availability, and delivery. The reduced diaphragm size and simpler integral signal-conditioning circuitry of these pressure sensors result in an overall 

Capacitive MEMS application for high frequency power sensor
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ABSTRACT A new method for measuring power of high-frequency signals based on MEMS technology is described. A capacitive lowloss MEMS component for frequencies up to 7 GHz has been designed. The design aspects including high frequency simulations to achieve 

Comparisons between data recorded by several 3-component coil geophones and a MEMS sensor at the Violet Grove monitor seismic survey
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ABSTRACT During the Violet Grove CO2 injection monitor seismic survey, several different 3-C coil geophones and a micro-electro mechanical system (MEMS) sensor were co-located at 8 adjacent stations along one of the receiver lines. The 3-C geophones were 

Design of a MEMS passive, proximity-based AC electric current sensor for residential and commercial loads
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ABSTRACT We present new considerations in the design of a MEMS passive, proximity-based electric current sensor for residential and commercial AC electric loads such as appliances and office equipment. The sensor device consists of a permanent magnet mounted to the 

Performance analysis of MEMS IMU/HSGPS/magnetic sensor integrated system in urban canyons
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ABSTRACT This paper focuses on evaluating the performance of a GPS/INS integrated system based on a HSGPS receiver and MEMS IMU, in an urban canyon environment. The main focus is on position accuracy analysis using a tightly coupled integration scheme. 

A novel optical MEMS pressure sensor with a mesa diaphragm
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ABSTRACT A novel pressure sensor with a mesa structure diaphragm based on microelectromechanical systems (MEMS) techniques is presented. The operating principle of the MEMS pressure sensor is expatiated by the Fabry-Parot (FP) cavity model and the 

A Self-powered MEMS sensor for AC electric current
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ABSTRACT A new type of MEMS sensor has been developed for measuring AC electric current. The sensor is comprised of a piezoelectric aluminum nitride MEMS cantilever with a microscale composite permanent magnet mounted to its free end. When placed in 

Development of a biosensor cartridge integrating active microfluidics, MEMS sensortechnology and detection electronics
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ABSTRACT A highly sophisticated disposable microfluidic cartridge integrating a MEMS biosensor with detection electronics and active microfluidic components is reported in this paper. This device developed as part of the cancer diagnostics/therapeutics system 


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