mems capacitive accelerometer research papers and mems design using comsol
A MEMS capacitive accelerometer design as middle ear microphone based on ossicular chain micromechanic characterization at umbo for fully implantable
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Over 30 million people in the United States and millions more around the world are affected by sensorineural hearing loss. Contemporary acoustic hearing aids can achieve moderate rehabilitation in a large number of sensorineural hearing loss cases. However, inherent
118-dB Dynamic Range, Continuous-Time, Opened-Loop Capacitance to Voltage Converter Readout for Capacitive MEMS Accelerometer
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ABSTRACT A high performance analog front-end (AFE) interface circuit for capacitive MEMS accelerometer is presented in this paper. The AFE was implemented in a continuoustime (CT), chopper stabilized, capacitance to voltage converter (CVC) topology with a variable
A Novel Offset Calibration Method to suppress Capacitive Mismatch in MEMS Accelerometer
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Since its first commercialization in 1990s, the MEMS capacitive accelerometer became an essential component for variety of applications such as automobile and mobile industry given its small form-factor and ability to sense miniscule acceleration. The changing
3-Axis accelerometer and strain sensor readout for MEMS-based capacitive sensors
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ABSTRACT A low-power capacitive readout for MEMS-based strain sensors and accelerometers is presented. A novel technique to optimise the trade-off between gain, bandwidth and noise is introduced. The readout can work with both types of sensors in the
Design of MEMS capacitive accelerometer with different perforated proof-mass for enhancement of performance
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ABSTRACT This work represents a study of perforated proof mass of a micro fabricated accelerometer with different perforation shapes, by application of load stress and displacement is measuredto know the deflection and flexibility of the proof mass.
MEMS Based Capacitive Accelerometer
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ABSTRACT Challenges in development of a surface micro-machined MEMS capacitive accelerometer are threefold:(a) successful fabrication of stiction free MEMS structure,(b) development of signal conditioning circuit to detect femto Farad level capacitance change
INVESTIGATING THE PERFORMANCE OF A MEMS CAPACITIVE ACCELEROMETER USING FINITE ELEMENT ANALYSIS
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ABSTRACT This paper focuses on studying the different physics involved in the operation of a novel capacitive MEMS (Micro-Electromechanical Systems) bulk-micromachined accelerometer, using Finite Element Analysis (FEA). A typical design for such sensors
Design of a MEMS Capacitive Comb-drive Accelerometer
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ABSTRACT This work describes of a novel, threedirection MEMS capacitive accelerometer for health monitoring applications. COMSOL Multiphysics was used to study the working principle and the dynamic performance of the accelerometer. In the first step, the motion of
Design, Fabrication, and Analysis of MEMS Three-Direction Capacitive Accelerometer
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ABSTRACT In this project we present the design and fabrication of a MEMS three-direction capacitive accelerometer. The design of the motion sensor includes sensing acceleration in the x-, y-, and zdirections, tilting, and free-fall. This device achieves this function
Model Reduction for Pull-in Voltage Analysis of SOI MEMS based Capacitive Accelerometer
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ABSTRACT In general, MEMS accelerometers fabrication relies more on trial and error than on clear design principles. Since the trial and error basis fabrication and testing of a MEMS are extremely costly, comprehensive modeling and simulation can be valuable tool to
A linear model based noise evaluation of a capacitive servo-accelerometer fabricated byMEMS
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ABSTRACT The noise characterization of a capacitive servo-accelerometer using a linear model is presented in this paper. The input reference noise of electronic circuit is expressed as a capacitive variation and it is introduced to a linear model for frequency response,
Capacitive MEMS Accelerometer Based on Silicon-on-Insulator Technology: Design, Simulation and Radiation Affect
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ABSTRACT This work introduces the design, simulation and the radiation effects for an out of plane micromachined z-axis accelerometer based on the silicon-on-insulator technology. In this design, the response to acceleration is sensed capacitevely via four comb-finger
AND FPGA IMPLEMENTATION OF NON-LINEARITY COMPENSATION OF CAPACITIVEPICK-OFF MEMS ACCELEROMETER FOR SATELLITE LAUNCH
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ALGORITHM The non-linear characteristics of the capacitive pick-off MEMS accelerometer are described mathematically, its inverse is found and cascaded in the signal path. Delta capacitance versus compensation of Capacitive sensing MEMS accelerometer for launch vehcle
Reconfigurable Closed-Loop Digital ?S Capacitive MEMS Accelerometer for Wide Dynamic Range, High Linearity Applications
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ABSTRACT Closed-loop capacitive MEMS accelerometer is similar to a ?S ADC where the MEMS sensor introduces second-order dynamics in the loop. The sensor has limited signal gain, hence provides very limited noise shaping capability to other noise contributions .
mems design using comsol
A computational design synthesis method for MEMS using COMSOL
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ABSTRACT Computational synthesis methods, used to help designers in the creative phase of the design process, often find an obstacle to their development in the difficulty of finding efficient simulation packages to integrate in the automated search of design solutions.
Design of MEMS based microcantilever using comsol multihysics
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ABSTRACT This paper presents the design simulations of MEMS based micro-cantilever made up of single crystal silicon using FEM (COMSOL Multiphysics). The cantilever structure on silicon substrate with optimized silicon dioxide film has been simulated. The simulations
Design and Analysis of Micro-Heaters using COMSOL Multiphysics For MEMS Based Gas Sensor
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ABSTRACT Micro-Heaters have been the subject of great interest owing to their extensive applications in gas sensors, humidity sensors and other micro-systems. A micro-heater should have low power consumption, low thermal mass and better temperature uniformity.
Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL
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ABSTRACT The investigation in this paper involves simulations of piezoresistive accelerometer system. The piezoresistive accelerometer is made up of square shaped proof mass with flexures supporting it. The piezoresistors are placed near the proof mass and frame ends
MEMS Electrostatic comb actuators with different configurations: A comparison of structuredesign and materials using COMSOL 3.5
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S Kapoor, D Kumar, B Prasad, A Gujjar ,University institute of ,uk.comsol.com ABSTRACT In this paper different electrostatic comb designs are compared on the basis of structure and materials. Large displacement comb actuators at low actuation voltage should employ large number of comb fingers, reduced distance between the combs and by
Advanced Applications of an Automated Generative Tool for MEMS Design Based onCOMSOL Multiphysics
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F Bolognini ,cn.comsol.com ABSTRACT This work presents a different use of COMSOL, not only as a simulation platform for engineering tasks, but also as an integrated component of a computational AI tool framework used to automate designs creation. CNS-Burst is a computational synthesis
A Computational Design Synthesis Method for MEMS Using COMSOL
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Improve computational support for conceptual design and embodiment •Generate multicriteria design archives for investigating complex
VLSI Layout Based Design Optimization of a Piezoresistive MEMS Pressure Sensors UsingCOMSOL
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Structural Mechanics: Used for structural design of the model which includes pre-setting of subdomain consists of silicon as substrate/diaphragm and polysilicon as piezoresistor. Resultant deflection and stress are also studied. Material System: Uses anisotropic
Design and Analysis of Multilayered MEMS Microphone using COMSOL Muliphysics
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Conclusions: The simulation of a pressure sensor with Si/PS composite membrane is reported. The results comparing characteristics of pressure sensors fabricated with membranes of (a) single crystalline silicon,(b) a Si/PS composite membrane with the same
Use of COMSOL Multiphysics for automated electrostatic MEMS sensor design
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ABSTRACT An optimization-based automated design tool using COMSOL Multiphysics and genetic algorithms was developed for design of a MEMS sensor. The discretized design variables included material distribution, electrode placement, actuation voltage and
Design of High Sensitivity and Fast Response MEMS Capacitive Humidity Sensor usingCOMSOL Multiphysics
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ABSTRACT This paper presents the simulated model of capacitive humidity sensor, which predicts transient response for various humidity ranges applicable for breath analysis. The structure consists of parallel plate electrode with dielectric polymer film, simulated using
Design and Analysis of Micro-Heaters for Temperature Optimisation Using COMSOLMultiphysics for MEMS Based Gas Sensor
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ABSTRACT Micro-Heaters are the key components in sub-miniature micro-sensors, especially in gas sensors. The metal oxide gas sensors utilize the properties of surface adsorption to detect changes in resistance as a function of varying concentration of different gases [5].
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